Comparative Study of Infrared Nd:YAG Pulsed Laser Radiation on Pt Thin Film

  • Bibi Zulaika Bhari Universiti Tun Hussein Onn Malaysia
  • Ahmad Hadi Ali Universiti Tun Hussein Onn Malaysia
  • Aliyu Kabiru Isiyaku Universiti Tun Hussein Onn Malaysia
  • Rabiatul Adawiah Ahmad Universiti Tun Hussein Onn Malaysia
Keywords: Pt thin films, Nd, YAG, laser radiation, resistivity, surface morphology

Abstract

This paper investigated on infrared Nd:YAG pulsed laser radiation on platinum (Pt) thin films. Pt thin films were deposited on Si by DC magnetron sputtering. Then, the deposited thin films were radiated by infrared Nd:YAG pulse laser at different laser energy. The radiated thin films were analysed based on the electrical and surface morphological properties. Four-point probe measurement shows that, the lowest resistivity was recorded when the energy laser are 110-170 mJ. Surface morphology scanned by scanning electron microscope (SEM) revealed that the surface of sample with lowest resistivity after radiated with laser is smoother than the as-deposited thin films. After laser radiation, the grain sizes of thin films increases due to the grain agglomeration on the surface area.
Published
2017-12-27
How to Cite
Bhari, B. Z., Ali, A. H., Isiyaku, A. K., & Ahmad, R. A. (2017). Comparative Study of Infrared Nd:YAG Pulsed Laser Radiation on Pt Thin Film. Journal of Science and Technology, 9(3). Retrieved from https://publisher.uthm.edu.my/ojs/index.php/JST/article/view/2061