Samynathan, Mugilesh, and Riyaz Ahmad Mohamed Ali. “Aluminium Nitride Thin Film Deposition Using Magnetron Sputtering on Silicon and Microscopic Glass Substrate for IDE Applications”. Evolution in Electrical and Electronic Engineering, vol. 5, no. 1, Apr. 2024, pp. 230-5, https://publisher.uthm.edu.my/periodicals/index.php/eeee/article/view/15310.