SAMYNATHAN, Mugilesh; MOHAMED ALI, Riyaz Ahmad. Aluminium Nitride Thin Film Deposition Using Magnetron Sputtering on Silicon and Microscopic Glass Substrate for IDE Applications. Evolution in Electrical and Electronic Engineering, [S. l.], v. 5, n. 1, p. 230–235, 2024. Disponível em: https://publisher.uthm.edu.my/periodicals/index.php/eeee/article/view/15310.. Acesso em: 19 may. 2024.