SAIDON, Nur Aqilah; MOHAMED ALI, Riyaz Ahmad. Aluminum Thin Film on Various Substrates using Magnetron Sputtering. Evolution in Electrical and Electronic Engineering, [S. l.], v. 4, n. 2, p. 86–91, 2023. Disponível em: https://publisher.uthm.edu.my/periodicals/index.php/eeee/article/view/13308.. Acesso em: 18 jul. 2024.