MOHD NOOR, Muhammad Hidayat; NAYAN, Nafarizal. Optimization of Reactive Ion Etching (RIE) Process Using SF6 and CHF3 Gases. Evolution in Electrical and Electronic Engineering, [S. l.], v. 3, n. 2, p. 80–88, 2022. Disponível em: https://publisher.uthm.edu.my/periodicals/index.php/eeee/article/view/8496. Acesso em: 8 apr. 2026.