Abd Aziz, Nurul Syamimi, et al. “Study On the Uniformity Aluminum Nitrate Thin Film On 2-Inch Silicon Substrate Prepared by RF Magnetron Sputtering”. Journal of Electronic Voltage and Application, vol. 4, no. 2, Dec. 2023, pp. 28-36, https://publisher.uthm.edu.my/ojs/index.php/jeva/article/view/15215.