ABD AZIZ, Nurul Syamimi; NAYAN, Nafarizal; AZMAN , Zulkifli; AHMAD , Mohd Yazid; JAHANZEB KHAN. Study On the Uniformity Aluminum Nitrate Thin Film On 2-Inch Silicon Substrate Prepared by RF Magnetron Sputtering. Journal of Electronic Voltage and Application, [S. l.], v. 4, n. 2, p. 28–36, 2023. Disponível em: https://publisher.uthm.edu.my/ojs/index.php/jeva/article/view/15215.. Acesso em: 13 may. 2024.