Abd Aziz NS, Nayan N, Azman Z, Ahmad MY, Jahanzeb Khan. Study On the Uniformity Aluminum Nitrate Thin Film On 2-Inch Silicon Substrate Prepared by RF Magnetron Sputtering. jeva. 2023;4(2):28-36. Accessed May 13, 2024. https://publisher.uthm.edu.my/ojs/index.php/jeva/article/view/15215