Z. . Azman, “Statistical Analysis of High-Power Impulse Magnetron Sputtering Parameters on the Growth and Composition of AlN Thin Films”, IJIE, vol. 17, no. 2, pp. 257–265, Jul. 2025, Accessed: Jul. 22, 2026. [Online]. Available: https://publisher.uthm.edu.my/ojs/index.php/ijie/article/view/16348