BAKRI, A. S.; NAYAN, N.; AHMAD, M. K.; FHONG, S. C.; SAHDAN, M. Z.; ABU BAKAR, A. S.; ABDUL MAJID, W. H.; TAHAN, M.; RASHIP, N. A. Fabrication of w-AlN Thin Films using Tilted Sputter Target and Unrotated Substrate Holder. International Journal of Integrated Engineering, v. 12, n. 4, p. 50-56, 30 Apr. 2020.