AZMAN, Zulkifli; NAYAN, Nafarizal; ABU BAKAR, Ahmad Shuhaimi; SAHARI, Norain; BAKRI, Anis Suhaili; MOHD ROFEI MAT HUSSIN; AHMAD, Mohd Yazid. Statistical Analysis of High-Power Impulse Magnetron Sputtering Parameters on the Growth and Composition of AlN Thin Films. International Journal of Integrated Engineering, [S. l.], v. 17, n. 2, p. 257–265, 2025. Disponível em: https://publisher.uthm.edu.my/ojs/index.php/ijie/article/view/16348. Acesso em: 7 apr. 2026.