BAKRI, Anis Suhaili; NAYAN, Nafarizal; AHMAD, Mohd Khairul; FHONG, Soon Chin; SAHDAN, Mohd Zainizan; ABU BAKAR, Ahmad Shuhaimi; ABDUL MAJID, Wan Haliza; TAHAN, Muliana; RASHIP, Nur Amaliyana. Fabrication of w-AlN Thin Films using Tilted Sputter Target and Unrotated Substrate Holder. International Journal of Integrated Engineering, [S. l.], v. 12, n. 4, p. 50–56, 2020. Disponível em: https://publisher.uthm.edu.my/ojs/index.php/ijie/article/view/4350. Acesso em: 7 apr. 2026.