Tahan, M., Nafarizal, N., Sahdan, M. Z., Bakri, A. S., Raship, N. A., Ahmad, M. K. ., Soon, C. F. ., & Ahmad, M. Y. (2020). Growth of Aluminium Nitride Thin Film using Pulse-Modulated Rf Magnetron Sputtering Plasma. International Journal of Integrated Engineering, 12(2), 132-138. https://publisher.uthm.edu.my/ojs/index.php/ijie/article/view/5697