Azman, Z. .; Nayan, N. .; Abu Bakar, A. S. .; Sahari, N.; Bakri, A. S.; Mohd Rofei Mat Hussin; Ahmad, M. Y. . Statistical Analysis of High-Power Impulse Magnetron Sputtering Parameters on the Growth and Composition of AlN Thin Films. IJIE 2025, 17 (2), 257-265.