The preliminary studies on preparation and characterization of bulk nanoporous zinc as a laser target candidate to generate soft x-ray

  • Mohd Lutfi Ahmad Shahar UNIMAP
  • Shamsul Amir Abdul Rais UNIMAP
  • Mohamad Halim Abd. Wahid UNIMAP
  • Izzul Hasif Che Idris UNIMAP
  • Mazlee Mazalan UNIMAP
  • Mohd Fairus Ahmad UNIMAP
  • Mohd Natashah Norizan UNIMAP
Keywords: EUV lithography, bulk nanoporous, laser produce plasma

Abstract

Bulk nanoporous metal has become a reliable source to replace liquid as source to generate EUV lithography which have debris problem to tackle. A solid yet low density porous material promised a low melting point and low plasma density. The plasma density of bulk nanoporous Sn and SnO2 profile plays a key role in the generation of 13.5 nm light for an extreme ultraviolet lithography (EUVL) source from laser produced plasma (LPP). The success of this preparation method might solve problems related to EUV lithography, or even soft Xray (XUV) lithography. In this paper, we present the preliminary result of preparing such ideal low density target in form of bulk metal porous.

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Author Biographies

Mohd Lutfi Ahmad Shahar, UNIMAP
School of Microelectronic Engineering (SoME)
University Malaysia Perlis (UniMAP)
Shamsul Amir Abdul Rais, UNIMAP
School of Microelectronic Engineering (SoME)
University Malaysia Perlis (UniMAP)
Mohamad Halim Abd. Wahid, UNIMAP
School of Microelectronic Engineering (SoME)
University Malaysia Perlis (UniMAP)
Izzul Hasif Che Idris, UNIMAP
School of Microelectronic Engineering (SoME)
University Malaysia Perlis (UniMAP)
Mazlee Mazalan, UNIMAP
School of Microelectronic Engineering (SoME)
University Malaysia Perlis (UniMAP)
Mohd Fairus Ahmad, UNIMAP
School of Microelectronic Engineering (SoME)
University Malaysia Perlis (UniMAP)
Mohd Natashah Norizan, UNIMAP
School of Microelectronic Engineering (SoME)
University Malaysia Perlis (UniMAP)
How to Cite
Ahmad Shahar, M. L., Abdul Rais, S. A., Abd. Wahid, M. H., Che Idris, I. H., Mazalan, M., Ahmad, M. F., & Norizan, M. N. (1). The preliminary studies on preparation and characterization of bulk nanoporous zinc as a laser target candidate to generate soft x-ray. International Journal of Integrated Engineering, 4(3). Retrieved from https://publisher.uthm.edu.my/ojs/index.php/ijie/article/view/623
Section
Issue on Electrical and Electronic Engineering